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SME Series III (modified)



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Brand: SME

The SME Series III (modified) is a high-performance, air-bearing surface metrology system designed specifically for semiconductor manufacturing, precision optics, and other critical industries. This modified version of the original SME Series III system is designed to address the specific needs of these industries, which require the highest levels of precision and accuracy. Some of the modifications include increased sensitivity and resolution, faster scanning rates, and improved software capabilities for easier data analysis and reporting.Key features of the SME Series III (modified) include:1. Air bearings: The system uses a unique air-bearing design that eliminates contact between the measuring head and the sample, reducing friction and minimizing errors.2. High accuracy: The system is capable of measuring surface features with sub-nanometer resolution and accuracy, making it ideal for applications where absolute precision is required.3. High resolution: With a resolution of up to 0.005 micrometers (0.000005 meters) in the XY planes and 0.017 micrometers (0.000017 meters) in the Z plane, the SME Series III (modified) is capable of measuring even the most subtle surface topography.4. Fast scanning: The system is capable of scanning at speeds of up to 200 meters per second, allowing for efficient data acquisition on large samples.5. Improved software: The system comes with advanced software tools for data analysis and reporting, including automated error mapping, statistical process control (SPC) charts, and report generation capabilities.Overall, the SME Series III (modified) is a highly specialized metrology system designed for the most demanding applications in semiconductor manufacturing, precision optics, and other critical industries. Its outstanding performance in accuracy, resolution, and scanning speed, combined with its user-friendly software tools, make it an indispensable tool for optimizing manufacturing processes and ensuring product quality.



  • Effective Length: 233.2 mm
  • Overhang:
  • Offset Angle:
  • Pivot to Spindle: 215.4 mm
  • Cartridge Range: 0.1-13.0 g
  • Effective Mass: 5 g
  • VTA Adjust: Yes
  • Arm Mount: SME
  • Headshell: Removable
  • Null Points: 66/121 mm

SME Series III (modified)

SME Series III (modified)

SME Series III (modified)

SME Series III (modified)



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